High-Q micromechanical resonators in a two-dimensional phononic crystal slab

Applied Physics Letters

Volumn 94, Issue 5, 2009, Pages

  Mohammadi, Saeed ^a   Eftekhar, Ali Asghar ^a   Hunt, William D ^a   Adibi, Ali ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PHONONS; RESONATORS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS;

ACOUSTIC ENERGIES; CAVITY REGIONS; COMPATIBLE PROCESS; EXPERIMENTAL DATUM; FINITE ELEMENTS; HEXAGONAL ARRAYS; LINE DEFECTS; METAL-OXIDE SEMICONDUCTORS; MICRO-MECHANICAL RESONATORS; PHONONIC BAND GAPS; PHONONIC CRYSTALS; QUALITY FACTORS; RESONANT MODES; RESONATOR STRUCTURES; SENSING APPLICATIONS; TWO-DIMENSIONAL PHONONIC CRYSTALS; WIRELESS COMMUNICATIONS;

CRYSTAL STRUCTURE;

EID: 59849120178     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3078284     Document Type: Article

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