Support loss-free micro/nano-mechanical resonators using phononic crystal slab waveguides

2010 IEEE International Frequency Control Symposium, FCS 2010

Volumn , Issue , 2010, Pages 521-523

  Mohammadi, Saeed ^a   Eftekhar, Ali A ^a   Adibi, Ali ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Micro electro mechanical system; Phononic band gap; Phononic crystal; Resonator; Waveguide

Indexed keywords

ELASTIC ENERGY; FREE SPECTRAL RANGE; FREQUENCY RANGES; IN-PLANE DIRECTION; INHOMOGENEOUS MATERIALS; MECHANICAL RESONATORS; MECHANICAL VIBRATIONS; MICRO ELECTRO MECHANICAL SYSTEM; MICROMECHANICAL RESONATOR; PERIODIC VARIATION; PHONONIC BAND GAPS; PHONONIC CRYSTAL; QUALITY FACTORS; RESONANT MODE; SPECTRAL RANGE; SPURIOUS MODES; SUPPORT LOSS; SUPPORTING STRUCTURE; THIN FILM PIEZOELECTRIC; TWO-DIMENSIONAL (2D) PERIODICITY; VERY HIGH FREQUENCY;

ACOUSTIC DEVICES; COMPOSITE MICROMECHANICS; ENERGY GAP; MECHANICAL ENGINEERING; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; PHONONS; RESONANCE; VIBRATIONS (MECHANICAL); WAVEGUIDES;

RESONATORS;

EID: 77957865434     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2010.5556276     Document Type: Conference Paper

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