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Journal of Vacuum Science and Technology B

Volumn 28, Issue 5, 2010, Pages 912-915

TiN thin film resistors for monolithic microwave integrated circuits

(4) Malmros, Anna a Südow, Mattias a Andersson, Kristoffer a Rorsman, Niklas a

a CHALMERS UNIVERSITY OF TECHNOLOGY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED DETECTORS; INFRARED RADIATION; MONOLITHIC INTEGRATED CIRCUITS; RESISTORS; THIN FILM CIRCUITS; THIN FILMS; TIN; TITANIUM NITRIDE;

DISSIPATED POWER; ELECTRICAL STRESS; INFRARED MEASUREMENTS; LONG TERM STABILITY; MEASUREMENT OF THE RESISTIVITY; REACTIVE SPUTTER-DEPOSITION; THERMAL-INFRARED; THIN FILM RESISTORS; TITANIUM NITRIDE LAYER; TITANIUM NITRIDE THIN FILMS;

TIMING CIRCUITS;

EID: 77957741015 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3475532 Document Type: Article

Times cited : (12)

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