Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2319-2322

  Laboriante, I ^a   Klejwa, N ^b   Suwandi, A ^a   Carraro, C ^a   Howe, Roger T ^b   Maboudian, R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Stanford University   (United States)

Author keywords

MEMS; polycrystalline silicon; silicon carbide; solid lubrication; stiction; wear resistance

Indexed keywords

ADHESION FORCES; MICROFABRICATED; PHYSICO-CHEMICALS; POLY-CRYSTALLINE SILICON; POLY-SIC; POLYCRYSTALLINE SIC; POLYCRYSTALLINE SILICON (POLY-SI); SIC COATINGS; SILICON CARBIDE COATINGS; SOLID LUBRICATION; TEST STRUCTURE;

ACTUATORS; ADHESION; CHEMICAL PROPERTIES; COATINGS; CONTACTS (FLUID MECHANICS); ELECTRIC PROPERTIES; MICROSYSTEMS; POLYSILICON; SILICON CARBIDE; SURFACE PROPERTIES; WEAR RESISTANCE;

SOLID-STATE SENSORS;

EID: 80052126829     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969544     Document Type: Conference Paper

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