Measurement and modeling of adhesion energy between two rough microelectromechanical system (MEMS) surfaces

Journal of Adhesion Science and Technology

Volumn 22, Issue 5-6, 2008, Pages 429-455

  Xue, Xiaojie ^a,c   Polycarpou, Andreas A ^a   Phinney, Leslie M ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c Analogue Devices Inc   (United States)

Author keywords

adhesion energy; capillary force; maugis dugdale model; meniscus model; Microelectromechanical systems (mems); pearson distribution; roughness

Indexed keywords

ADHESION ENERGY; ADHESION FAILURES; ASPERITY HEIGHTS; ATOMIC FORCE MICROSCOPE (AFM); BEAM DEFLECTION; BEAM DISPLACEMENT; CAPILLARY FORCE; CRACK LENGTH; EXPERIMENTAL SETUP; FIXED ENDS; HUMIDITY LEVELS; IN-SITU; MEMSDEVICES; MICRO-CANTILEVERS; MICROCANTILEVER ARRAYS; PEARSON DISTRIBUTION; PEEL TESTS; PIEZO ACTUATOR; SINGLE ASPERITY; SOLID SURFACE; STATISTICAL MODELS; STATISTICS-BASED MODELS; SURFACE ROUGHNESS PARAMETERS;

ADHESION; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; HUMIDITY CONTROL; PROBABILITY DENSITY FUNCTION; SUBSTRATES; SURFACE ROUGHNESS;

MEMS;

EID: 77957800647     PISSN: 01694243     EISSN: 15685616     Source Type: Journal    
DOI: 10.1163/156856108X305570     Document Type: Article

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