Nonlinear dynamics of spring softening and hardening in folded-mems comb drive resonators

Journal of Microelectromechanical Systems

Volumn 20, Issue 4, 2011, Pages 943-958

  Elshurafa, Amro M ^a   Khirallah, Kareem ^b   Tawfik, Hani H ^b   Emira, Ahmed ^a,c   Abdel Aziz, Ahmed K S ^d   Sedky, Sherif M ^b  

^a KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Saudi Arabia)

^b The American University in Cairo   (Egypt)

^c CAIRO UNIVERSITY   (Egypt)

^d UNIVERSITY OF WATERLOO   (Canada)

Author keywords

Electrostatic actuation; folded suspension; microelectromechanical systems (MEMS) resonators; nonlinear dynamics; perturbation; spring hardening and softening

Indexed keywords

ELECTROSTATIC ACTUATION; FOLDED SUSPENSION; MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATORS; NON-LINEAR DYNAMICS; PERTURBATION; SPRING HARDENING AND SOFTENING;

BOUNDARY VALUE PROBLEMS; COMPOSITE MICROMECHANICS; DYNAMICS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; HARDENING; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES;

RESONATORS;

EID: 79961210486     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2148162     Document Type: Article

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