Design considerations in MEMS parallel plate variable capacitors

Midwest Symposium on Circuits and Systems

Volumn , Issue , 2007, Pages 1173-1176

  Elshurafa, Amro M ^a   El Masry, Ezz I ^a  

^a DALHOUSIE UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; DIELECTRIC DEVICES; ELECTRIC EQUIPMENT; MEMS; MICROELECTROMECHANICAL DEVICES; PAPER CAPACITORS; VARACTORS;

DESIGN CONSIDERATIONS; PARALLEL PLATES; VARIABLE CAPACITORS;

FINITE ELEMENT METHOD;

EID: 51449084892     PISSN: 15483746     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSCAS.2007.4488764     Document Type: Conference Paper

References (9)

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