Modeling and measurement of a bistable beam in a microelectromechanical system

Journal of Microelectromechanical Systems

Volumn 19, Issue 6, 2010, Pages 1503-1514

  Brake, Matthew R ^a   Baker, Michael S ^a   Moore, Nathan W ^a   Crowson, Douglas A ^a   Mitchell, John A ^a   Houston, Jack E ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Bistable mechanism; interfacial force microscopy; large deflection modeling; microelectromechanical systems

Indexed keywords

ANALYTICAL MODEL; AUTOMATED POSITIONING; BISTABLE BEAM; BISTABLE MECHANISMS; BISTABLES; CURRENT MEASUREMENTS; CURRENT THEORETICAL MODELS; DEFORMATION MODELS; EDGE WIDTHS; ELECTROSTATIC ACTUATION; EULER BERNOULLI BEAM THEORY; EULER BERNOULLI BEAMS; FORCE-FEEDBACK; IN-PLANE MECHANICAL PROPERTIES; INTERFACIAL FORCE MICROSCOPY; LARGE DEFLECTION; LARGE DEFORMATION MODELS; LATERAL FORCE; MANUFACTURING PROCESS; MEMSDEVICES; MICRO ELECTRO MECHANICAL SYSTEM; MICROELECTROMECHANICAL SYSTEMS; MODELING AND MEASUREMENT; OPTIMIZATION STUDIES; PARAMETER STUDIES; PROBE TIPS;

BEHAVIORAL RESEARCH; COMPOSITE MICROMECHANICS; DEFORMATION; ELECTROSTATIC ACTUATORS; MECHANICAL PROPERTIES; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES;

MATHEMATICAL MODELS;

EID: 78649640321     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2076781     Document Type: Article

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