Non-crossing differential capacitive MEMS accelerometer with electrostatic spring tuning

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

Volumn , Issue , 2006, Pages 4-8

  Ma Radzi, Ahmad Alabqari ^b,c   Majlis, Burhanuddin Yeop ^a,b  

^a IEEE

^b UNIVERSITI KEBANGSAAN MALAYSIA   (Malaysia)

^c UNIVERSITI TUN HUSSEIN ONN MALAYSIA   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; ELECTROSTATICS; MEASUREMENT THEORY; MEMS; MICROMACHINING;

CRITICAL DAMPING; ELECTROSTATIC FINGERS; ELECTROSTATIC SPRING TUNING; MEMS ACCELEROMETERS;

TUNING;

EID: 35148876032     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMELEC.2006.381009     Document Type: Conference Paper

References (10)

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