Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics

Volumn , Issue , 2004, Pages 663-667

  Alabqari, Ahmad ^b   Majlis, Burhanuddin Yeop ^a,b  

^a IEEE

^b UNIVERSITI KEBANGSAAN MALAYSIA   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS;

CAPACITIVE ACCELEROMETERS; COVENTORWARE; DC VOLTAGE; MEMS ACCELEROMETER; PROOF MASS; PULL-IN;

ELECTROSTATIC FORCE;

EID: 51349105359     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/smelec.2004.1620972     Document Type: Conference Paper

References (9)

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