Large-signal lumped-parameter macromodels for the equivalent circuit representation of electromechanical transducers

Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages 452-461

  Wen, Feina ^a   Li, Weihua ^a   Huang, Qing An ^a   Rong, Hua ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER HARDWARE DESCRIPTION LANGUAGES; COMPUTER SIMULATION; ELECTROSTATICS; EQUIVALENT CIRCUITS; POLYNOMIALS; RESONATORS; TRANSDUCERS;

CIRCUIT SIMULATORS; ELECTROMECHANICAL TRANSDUCERS; ELECTROMECHANICAL TRANSDUCTION; MACROMODELS;

MICROELECTROMECHANICAL DEVICES;

EID: 2342519454     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/4/004     Document Type: Article

References (9)

1. Romanowicz B F 1998 Methodology for the Modeling and Simulation of Microsystems (Boston: Kluwer) pp 27-87
2. Mukherjee T, Fedder K, Ramaswamy D and White J 2000 Emerging simulation approaches for micromachined devices IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst. 19 1572-89
3. Tilmans H A C 1996 Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems J. Micromech. Microeng. 6 157-76
4. Tilmans H A C 1997 Equivalent circuit representation of electromechanical transducers: II. Distributed-parameter systems J. Micromech. Microeng. 7 285-309
5. Veijola T et al 2000 Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method IEEE MTT-S Digest pp 99-102
6. Woodson H H and Melcher J R 1968 Electromechanical Dynamics Part I, II and III (New York: Wiley)
7. Tang W C, Nguyen T-C H and Howe R T 1989 Laterally driven polysilicon resonant microstructures Sensors Actuators 20 25-32
8. Senturia S D 2001 Microsystem Design (Boston: Kluwer)
9. Nguyen Clark T-C 1999 Frequency-selective MEMS for miniaturized low-power communication devices IEEE Trans. Microw. Theory Tech. 47 1486-502