Simulations and experiments of hardening and softening resonances in a clamped-clamped beam MEMS resonator

Sensors and Actuators, A: Physical

Volumn 162, Issue 2, 2010, Pages 225-234

  Mestrom, R M C ^a   Fey, R H B ^a   Phan, K L ^b   Nijmeijer, H ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

Author keywords

Experimental validation; MEMS resonator; Multiphysics modeling; Nonlinear dynamic behavior

Indexed keywords

CLAMPED-CLAMPED BEAM; DESIGN OPTIMIZATION; ELECTROSTATIC EFFECT; EXCITATION PARAMETERS; EXPERIMENTAL APPROACHES; EXPERIMENTAL VALIDATIONS; FIRST-PRINCIPLES; MEMS RESONATOR; MEMS RESONATORS; MULTI-PHYSICS MODELING; NONLINEAR BEHAVIOR; NONLINEAR DYNAMIC BEHAVIORS; NONLINEAR EFFECT; REDUCED ORDER MODELS; THERMOELASTIC DAMPING;

EXPERIMENTS; HARDENING; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; THERMOELASTICITY;

RESONATORS;

EID: 77957157864     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.04.020     Document Type: Conference Paper

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