Dislocations and impurities introduced from etch-pits at the epitaxial growth resumption of diamond

Diamond and Related Materials

Volumn 20, Issue 7, 2011, Pages 875-881

  Tallaire, A ^a   Barjon, J ^b   Brinza, O ^a   Achard, J ^a   Silva, F ^a   Mille, V ^a   Issaoui, R ^a   Tardieu, A ^a   Gicquel, A ^a  

^a CNRS   (France)

^b LABORATOIRE DES SCIENCES DU CLIMAT ET DE L ENVIRONNEMENT   (France)

Author keywords

Defects; Diamond growth; Impurities; Luminescence

Indexed keywords

ACTIVE LAYER; BACKGROUND IMPURITIES; CRYSTAL QUALITIES; DIAMOND GROWTH; DIAMOND-BASED ELECTRONIC DEVICES; DOPING CONCENTRATION; ETCH PITS; HIGH DISLOCATION DENSITY; HIGH-POWER; HOMOEPITAXIAL DIAMOND FILMS; LONG LIFETIME; PLASMA-CVD; ROUGHENED SURFACES; THREADING DISLOCATION;

BORON; BORON COMPOUNDS; CRYSTAL IMPURITIES; DIAMOND FILMS; DIAMONDS; DISLOCATIONS (CRYSTALS); EPITAXIAL FILMS; ETCHING; FILM GROWTH; LIGHT EMISSION; PHOSPHORESCENCE; SEMICONDUCTOR DOPING; SINGLE CRYSTALS; SURFACE ROUGHNESS;

EPITAXIAL GROWTH;

EID: 79960822231     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.04.015     Document Type: Article

References (31)

1. A. Denisenko, and E. Kohn Diam. Relat. Mat. 14 2005 491
2. K. Hassouni, F. Silva, and A. Gicquel J. Phys. D 43 2010 153001
3. J. Achard, F. Silva, O. Brinza, A. Tallaire, and A. Gicquel Diam. Relat. Mat. 16 2007 685
4. H. Kato, T. Makino, S. Yamasaki, and H. Okushi J. Phys. D 40 2007 6189
5. R. Issaoui, J. Achard, F. Silva, A. Tallaire, A. Tardieu, A. Gicquel, M.A. Pinault, and F. Jomard Appl. Phys. Lett. 97 2010 182101
6. H. Yamada, A. Chayahara, Y. Mokuno, H. Umezawa, S.-i. Shikata, and N. Fujimori Appl. Phys. Express 3 2010 051301
7. M. Kadri, D. Araujo, M. Wade, A. Deneuville, and E. Bustarret Diam. Relat. Mat. 14 2005 566
8. G. Frangieh, M.A. Pinault, J. Barjon, T. Tillocher, F. Jomard, and J. Chevallier Physica Status Solidi (A) 206 2009 2000
9. G. A. Scarsbrook, P. M. Martineau et al. United States patent No. US 7160617B2 (2007)
10. A.T. Blumenau, M.I. Heggie, C.J. Fall, R. Jones, and T. Frauenheim Phys. Rev. B 65 2002 205205
11. P.M. Martineau, S.C. Lawson, A.J. Taylor, S.J. Quinn, D.J.F. Evans, and M.J. Crowder Gems & Gemology 40 2004 2
12. P.M. Martineau, M.P. Gaukroger, K.B. Guy, S.C. Lawson, D.J. Twitchen, I. Friel, J.O. Hansen, G.C. Summerton, T.P.G. Addison, and R. Burns J. Phys. Condens. Matter 21 2009 364205
13. P. Martineau, M. Gaukroger, R. Khan, and D. Evans Physica Status Solidi C 6 2009 1953 1957
14. P.-N. Volpe, P. Muret, F. Omnes, J. Achard, F. Silva, O. Brinza, and A. Gicquel Diam. Relat. Mat. 18 2009 1205 1210
15. A. Tallaire, M. Kasu, and K. Ueda Diam. Relat. Mat. 17 2008 506 510
16. G. A. Scarsbrook, P. M. Martineau et al. United States Patent US 7128974 B2 (2006)
17. A. Tallaire, J. Achard, F. Silva, R.S. Sussmann, A. Gicquel, and E. Rzepka Physica Status Solidi 201 2004 2419 2424
18. A.M. Zaïtsev Optical Properties of Diamond: a Data Handbook 2001 Springer
19. D. Takeuchi, H. Watanabe, H. Sawada, S. Yamanaka, H. Ichinose, T. Sekiguchi, and H. Okushi Diam. Relat. Mat. 10 2001 526 530
20. G. Janssen, J.J. Schermer, W.J.P. van-Enckevort, and L.J. Giling J. Crystal Growth 125 1992 42
21. F. Silva, J. Achard, O. Brinza, X. Bonnin, K. Hassouni, A. Anthonis, K. De Corte, and J. Barjon Diam. Relat. Mat. 18 2009 682
22. K. Watanabe, S.C. Lawson, J. Isoya, H. Kanda, and Y. Sato Diam. Relat. Mat. 6 1997 99
23. W. Wang, M. Hall, K. Moe, J. Tower, and T. Moses Gems & Gemology 43 2007 294
24. O. Brinza, J. Achard, F. Silva, X. Bonnin, P. Barroy, K. De Corte, and A. Gicquel Phys. Stat. Sol. 205 2008 2114 2120
25. F.K. de Theije, O. Roy, N.J. van der Laag, and W.J.P. van Enckevort Diam. Relat. Mat. 9 2000 929
26. J. Achard, F. Silva, O. Brinza, X. Bonnin, V. Mille, R. Issaoui, M. Kasu, and A. Gicquel Physica Status Solidi 206 2009 1949 1954
27. M.J. Kappers, R. Datta, R.A. Oliver, F.D.G. Rayment, M.E. Vickers, and C.J. Humphreys J. Crystal Growth 300 2007 70 74
28. R. Datta, and C.J. Humphreys Physica Status Solidi C 3 2006 1750 1753
29. R. Sauer Thin Film Diamond I.Semiconductors and Semimetals Series volume 76 2004 Elsevier, Academic Press
30. J. Barjon, T. Tillocher, N. Habka, O. Brinza, J. Achard, R. Issaoui, F.Silva, C. Mer, P. Bergonzo, to be published in Phys. Rev. B.
31. N. Habka, J. Barjon, A. Lazea, and K. Haenen J. Appl. Phys. 107 2010 103531 103534