A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

Optics Express

Volumn 19, Issue 15, 2011, Pages 13812-13824

  Koh, Kah How ^a   Kobayashi, Takeshi ^b   Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; MIRRORS; NATURAL FREQUENCIES; PIEZOELECTRICITY; SILICON WAFERS;

AC VOLTAGE; ACTUATION MATERIALS; DIFFERENT FREQUENCY; DYNAMIC EXCITATIONS; ELECTRICAL SIGNAL; LISSAJOUS; MEMS SCANNING MIRROR; MICRO MIRROR; MICROMACHINED; MIXED MODE; MODES OF OPERATION; ON DYNAMICS; OPTICAL DEFLECTION ANGLE; PZT; PZT ACTUATOR; PZT THIN FILM; RELEASE PROCESS; S-SHAPED; SI DEVICES; SOI WAFERS; TORSIONAL MODES;

PIEZOELECTRIC ACTUATORS;

EID: 79960549390     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.013812     Document Type: Article

References (30)

1. M. C. Wu, O. Solgaard, and J. E. Ford, "Optical MEMS for Lightwave Communication," J. Lightwave Technol. 24(12), 4433-4454 (2006). (Pubitemid 46350917)
2. C. Lee and J. A. Yeh, "Development and evolution of MOEMS technology in variable optical attenuators," J. Micro/Nanolith, 7(2), 021003 (2008).
3. R. F. Wolffenbuttel, "MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range," J. Micromech. Microeng. 15(7), S145-S152 (2005). (Pubitemid 40877133)
4. B. T. Liao, H. H. Shen, H. H. Liao, and Y. J. Yang, "A bi-stable 2x2 optical switch monolithically integrated with variable optical attenuators," Opt. Express 17(22), 19919-19925 (2009).
5. P. J. Gilgunn, J. Liu, N. Sarkar, and G. K. Fedder, "CMOS-MEMS Lateral Electrothermal Actuators," J. Microelectromech. Syst. 17(1), 103-114 (2008). (Pubitemid 351343923)
6. H. Xie, Y. Pan, and G. K. Fedder, "A CMOS-MEMS mirror with curled-hinge comb drives," J. Microelectromech. Syst. 12(4), 450-457 (2003).
7. A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, "Two-axis electromagnetic microscanner for high resolution displays," J. Microelectromech. Syst. 15(4), 786-794 (2006). (Pubitemid 44251386)
8. K. Jongbaeg, D. Christensen, and L. Lin, "Monolithic 2-D scanning mirror using self-aligned angular vertical comb drives," IEEE Photon. Technol. Lett. 17(11), 2307-2309 (2005). (Pubitemid 41594801)
9. H.-A. Yang, T.-L. Tang, S. T. Lee, and W. Fang, "A Novel Coilless Scanning Mirror Using Eddy Current Lorentz Force and Magnetostatic Force," J. Microelectromech. Syst. 16(3), 511-520 (2007). (Pubitemid 47241352)
10. C.-H. Ji, M. Choi, S.-C. Kim, K.-C. Song, J.-U. Bu, and H.-J. Nam, "Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field," J. Microelectromech. Syst. 16(4), 989-996 (2007). (Pubitemid 47278840)
11. S. O. Isikman, O. Ergeneman, A. D. Yalcinkaya, and H. Urey, "Modeling and Characterization of Soft Magnetic Film Actuated 2-D Scanners," IEEE J. Sel. Top. Quantum Electron. 13(2), 283-289 (2007). (Pubitemid 46652367)
12. T. Iseki, M. Okumura, and T. Sugawara, "Shrinking design of a MEMS optical scanner having four torsion beams and arms," Sens. Actuators A Phys. 164(1-2), 95-106 (2010).
13. C. Lee, T. Itoh, and T. Suga, "Self-excited piezoelectric PZT microcantilevers for dynamic SFM - with inherent sensing and actuating capabilities," Sens. Actuators A Phys. 72(2), 179-188 (1999).
14. T. Itoh, C. Lee, and T. Suga, "Deflection detection and feedback actuation using a self-excited piezoelectric Pb(Zr,Ti)O-3 microcantilever for dynamic scanning force microscopy," Appl. Phys. Lett. 69(14), 2036-2038 (1996). (Pubitemid 126620392)
15. F. Filhol, E. Defay, C. Divoux, C. Zinck, and M. T. Delaye, "Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning," Sens. Actuators A Phys. 123-24, 483-489 (2005). (Pubitemid 41315888)
16. Y. Yasuda, M. Akamatsu, M. Tani, T. Iijima, and H. Toshiyoshi, "Piezoelectric 2d-Optical Micro Scanners with Pzt Thick Films," Integr. Ferroelectr. 76(1), 81-91 (2005).
17. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, and H. Toshiyoshi, "A laser display using a PZT-actuated 2D optical scanner," in Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on(2005), pp. 9-10. (Pubitemid 44462042)
18. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, and H. Toshiyoshi, "A Combination of Fast Resonant Mode and Slow Static Deflection of SOI-PZT Actuators for MEMS Image Projection Display," IEEE/LEOS International Conference on Optical MEMS and Their Applications, 25-26 (2006).
19. M. Tani, M. Akamatsu, Y. Yasuda, and H. Toshiyoshi, "A two-axis piezoelectric tilting micromirror with a newly developed PZT-meandering actuator," IEEE 20th International Conference on Micro Electro Mechanical Systems, 699-702 (2007).
20. T. Kobayashi, R. Maeda, T. Itoh, and R. Sawada, "Smart optical microscanner with piezoelectric resonator, sensor, and tuner using Pb(Zr,Ti)O[sub 3] thin film," Appl. Phys. Lett. 90(18), 183514 (2007).
21. W. P. Robbins, D. L. Polla, and D. E. Glumac, "High-displacement piezoelectric actuator utilizing a meander-line geometry I. Experimental characterization," IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38(5), 454-460 (1991).
22. J. G. Smits and W. Choi, "The constituent equations of piezoelectric heterogeneous bimorphs," IEEE Trans. Ultrason. Ferroelectr. Freq. Control 38(3), 256-270 (1991).
23. 3 buffered Pb(Zr,Ti)O-3 thin film," J. Micromech. Microeng. 18(3), 035007031-035007035 (2008).
24. K. H. Koh, C. Lee, and T. Kobayashi, "A Piezoelectric-Driven Three-Dimensional MEMS VOA Using Attenuation Mechanism With Combination of Rotational and Translational Effects," J. Microelectromech. Syst. 19(6), 1370-1379 (2010).
25. T. Kobayashi, M. Ichiki, J. Tsaur, and R. Maeda, "Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition," Thin Solid Films 489(1-2), 74-78 (2005). (Pubitemid 41084147)
26. T. Kobayashi, H. Okada, T. Masuda, R. Maeda, and T. Itoh, "A digital output piezoelectric accelerometer using a Pb(Zr, Ti)O-3 thin film array electrically connected in series," Smart Mater. Struct. 19(10), 105030 (2010).
27. K. H. Koh, T. Kobayashi, F.-L. Hsiao, and C. Lee, "Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors," Sens. Actuators A Phys. 162(2), 336-347 (2010).
28. K. H. Koh, T. Kobayashi, J. Xie, A. Yu, and C. Lee, "Novel piezoelectric actuation mechanism for a gimbal-less mirror in 2D raster scanning applications," J. Micromech. Microeng. 21(7), 075001 (2011).
29. P. Muralt, R. G. Polcawich, and S. Trolier-McKinstry, "Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting," MRS Bull. 34(09), 658-664 (2009).
30. D. Isarakorn, A. Sambri, P. Janphuang, D. Briand, S. Gariglio, J. M. Triscone, F. Guy, J. W. Reiner, C. H. Ahn, and N. F. de Rooij, "Epitaxial piezoelectric MEMS on silicon," J. Micromech. Microeng. 20(5), 055008 (2010).