Shrinking design of a MEMS optical scanner having four torsion beams and arms

Sensors and Actuators, A: Physical

Volumn 164, Issue 1-2, 2010, Pages 95-106

  Iseki, Takayuki ^a   Okumura, Mikio ^a   Sugawara, Takashi ^a  

^a Victor Company of Japan Limited   (Japan)

Author keywords

Laser display; MEMS; Optical deflection angle; Scanner; Sub arm; Torsional beam

Indexed keywords

DESIGN; ELECTROMECHANICAL DEVICES; LASER RECORDING; MEMS; NATURAL FREQUENCIES; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; TORSIONAL STRESS; WAFER BONDING;

LASER DISPLAY; OPTICAL DEFLECTION ANGLE; SCANNER; SUB-ARM; TORSIONAL BEAM;

SCANNING;

EID: 78249264456     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.09.007     Document Type: Review

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