A digital output piezoelectric accelerometer using a Pb(Zr, Ti)O 3 thin film array electrically connected in series

Smart Materials and Structures

Volumn 19, Issue 10, 2010, Pages

  Kobayashi, T ^a,b   Okada, H ^a,b   Masuda, T ^b,c   Maeda, R ^a   Itoh, T ^a,b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AC-TO-DC; CMOS SWITCH; CONVERSION CIRCUITS; DIGITAL OUTPUT; FILM ARRAYS; MICROELECTROMECHANICAL SYSTEMS; MICROFABRICATION PROCESS; OUTPUT VOLTAGES; PB(ZR , TI)O; PIEZO-ELECTRIC ACCELEROMETERS; PIEZOELECTRIC PLATE; PIEZOELECTRIC THIN FILMS; PZT; ULTRA-LOW POWER CONSUMPTION; WIRELESS SENSOR NODE;

ACCELEROMETERS; DC POWER TRANSMISSION; ELECTRIC NETWORK SYNTHESIS; LEAD; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; SEMICONDUCTOR SWITCHES; SENSOR NODES; TELECOMMUNICATION EQUIPMENT; THIN FILMS; VAPOR DEPOSITION; ZIRCONIUM;

PIEZOELECTRICITY;

EID: 78649258636     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/19/10/105030     Document Type: Article

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