Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 483-489

  Filhol, F ^a   Defay E ^a   Divoux, C ^a   Zinck, C ^a   Delaye, M T ^a  

^a CEA LETI   (France)

Author keywords

Micro mirror; Optical MEMS; Optical scanning; Piezoelectric actuator

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ETCHING; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; SCANNING; SILICON; SINGLE CRYSTALS; THIN FILM DEVICES;

MICRO-MIRRORS; OPTICAL BEAM SCANNING; OPTICAL MEMS; PIEZOELECTRIC ACTUATORS;

MIRRORS;

EID: 24944568796     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.04.029     Document Type: Conference Paper

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