A two-axis piezoelectric tilting micromirror with a newly developed PZT-meandering actuator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 669-702

  Tani, Masanao ^a   Akamatsu, Masahiro ^a   Yasuda, Yoshiaki ^a   Toshiyoshi, Hiroshi ^b  

^a STANLEY ELECTRIC CO LTD   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

2D optical scanner; ADRIP; Arc discharge reactive ion plating; PZT

Indexed keywords

ACTUATORS; COMPOSITE MICROMECHANICS; DATA RECORDING; LASER RECORDING; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC TRANSDUCERS; REACTIVE ION ETCHING; SCANNING; TWO DIMENSIONAL;

2D-OPTICAL SCANNER; ACTUATOR DESIGN; ADRIP; ANGULAR DISPLACEMENTS; APPLIED VOLTAGES; ARC DISCHARGE REACTIVE ION PLATING; DOUBLE-GIMBAL; INTERNATIONAL CONFERENCES; MECHANICAL DESIGNS; MICRO MIRRORS; MICRO-ELECTRO MECHANICAL SYSTEMS; NON-RESONANT; OPTICAL SCANNERS; PIEZO-ELECTRIC UNI-MORPH ACTUATOR; PIEZOELECTRIC CANTILEVERS; PZT; STATIC DEFLECTIONS; TWO-AXIS;

PIEZOELECTRICITY;

EID: 52249113729     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. K. Takahashi, H. N. Kwon, M. Mita, H. Fujita, H. Toshiyoshi, K. Suzuki, H. Funaki, "Monolithic Integration of High Voltage Driver Circuits and MEMS Actuators by ASIC-like postprocess," Proc. 13th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June 5-9, 2005, Seoul, Korea.
2. Miyajima, H. Asaoka, N. Arima, M. Minamoto, Y. Murakami, K. Tokuda, K. Matsumoto, K. "A durable, shock-resistant electromagnetic optical scanner withpolyimide-based hinges," IEEE J. Microelectromech. Syst, vol. 10, pp. 418-424, June 2001.
3. Piezoelectric Materials in Devices,Edited and Published by N. Setter, Lausanne, Switzerland, 2002 p. 12
4. M. Akamatsu et al., "Fast Deposition of Lead-Zirconate-Titanate Thick Films by Arc Discharged Reactive-Ion Plating Method," Jpn. J. Appl. Phys. 41 (2002), pp. 6976-6979.
5. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita and H. Toshiyoshi, "A Laser Display using a PZT-Actuated 2D Optical Scanner," IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications, August 1-4, 2005, Oulu, Finland, pp. 9-10.
6. M. Tani, M. Akamatsu, Y. Yasuda, H. Fujita, and H. Toshiyoshi, "A combination of fast resonant mode and slow static deflection of SOI-PZT actuators for MEMS image projection display," Proc. IEEE/LEOS Int. Conf. on Optical MEMS and Their Applications (Optical MEMS 2006), Big Sky Resort, Big Sky, Montana, Aug. 21-24, 2006.
7. Qing-Ming Wang, L. Eric Cross, "Performance Analysis of Piezoelectric Cantilever Bending Actuators," Ferroelectrics, 1998, Vol. 215, pp. 187-213.