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Volumn 14, Issue 9, 2011, Pages

Improving the electrical properties of zinc tin oxide thin film transistors using atmospheric plasma treatment

Author keywords

[No Author keywords available]

Indexed keywords

AR PLASMAS; ATMOSPHERIC PLASMA TREATMENTS; AVERAGE FIELD; BACK CHANNELS; ELECTRICAL CHARACTERISTIC; NON-VACUUM; PLASMA TREATMENT; SUBTHRESHOLD SWING; ZINC TIN OXIDE;

EID: 79960235292     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3597660     Document Type: Article
Times cited : (15)

References (23)
  • 1
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  • 3
    • 0038136910 scopus 로고    scopus 로고
    • Transparent electronics
    • DOI 10.1126/science.1085276
    • J. F. Wager, Science, 300, 1245 (2003). 10.1126/science.1085276 (Pubitemid 36618226)
    • (2003) Science , vol.300 , Issue.5623 , pp. 1245-1246
    • Wager, J.F.1
  • 10
    • 13544269370 scopus 로고    scopus 로고
    • High mobility transparent thin-film transistors with amorphous zinc tin oxide channel layer
    • DOI 10.1063/1.1843286, 013503
    • H. Q. Chiang, J. F. Wager, R. L. Hoffman, J. Jeong, and D. A. Keszler, Appl. Phys. Lett., 86, 013503 (2005). 10.1063/1.1843286 (Pubitemid 40219489)
    • (2005) Applied Physics Letters , vol.86 , Issue.1 , pp. 0135031-0135033
    • Chiang, H.Q.1    Wager, J.F.2    Hoffman, R.L.3    Jeong, J.4    Keszler, D.A.5
  • 12
    • 27644464403 scopus 로고    scopus 로고
    • High-performance flexible zinc tin oxide field-effect transistors
    • DOI 10.1063/1.2120895, 193503
    • W. B. Jackson, R. L. Hoffman, and G. S. Herman, Appl. Phys. Lett., 87, 193503 (2005). 10.1063/1.2120895 (Pubitemid 41567680)
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    • Jackson, W.B.1    Hoffman, R.L.2    Herman, G.S.3
  • 14
    • 34547365696 scopus 로고    scopus 로고
    • Improvements in the device characteristics of amorphous indium gallium zinc oxide thin-film transistors by Ar plasma treatment
    • DOI 10.1063/1.2753107
    • J. S. Park, J. K. Jeong, Y. G. Mo, H. D. Kim, and S. I. Kim, Appl. Phys. Lett., 90, 262106 (2007). 10.1063/1.2753107 (Pubitemid 47141109)
    • (2007) Applied Physics Letters , vol.90 , Issue.26 , pp. 262106
    • Park, J.-S.1    Jeong, J.K.2    Mo, Y.-G.3    Kim, H.D.4    Kim, S.-I.5
  • 19
    • 0037285214 scopus 로고    scopus 로고
    • Dielectric-Barrier Discharges: Their History, Discharge Physics, and Industrial Applications
    • DOI 10.1023/A:1022470901385
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    • (2003) Plasma Chemistry and Plasma Processing , vol.23 , Issue.1 , pp. 1-46
    • Kogelschatz, U.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.