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Journal of Applied Physics

Volumn 109, Issue 11, 2011, Pages

Elemental distribution and oxygen deficiency of magnetron sputtered indium tin oxide films

(5) Thøgersen, Annett a Rein, Margrethe a Monakhov, Edouard a Mayandi, Jeyanthinath a Diplas, Spyros b,c

a INSTITUTE FOR ENERGY TECHNOLOGY (Norway)

b SINTEF MATERIALS AND CHEMISTRY (Norway)

c UNIVERSITY OF OSLO (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

DC MAGNETRON SPUTTERING; ELEMENTAL DISTRIBUTION; HIGH-ENERGY ELECTRON; INDIUM TIN OXIDE FILMS; INTERFACE LAYER; MONOCRYSTALLINE; OXYGEN DEFICIENCY; OXYGEN DEFICIENT; P-TYPE; SI WAFER; THIN LAYERS;

ATOMIC SPECTROSCOPY; CRYSTAL ATOMIC STRUCTURE; DC POWER TRANSMISSION; INDIUM; INDIUM COMPOUNDS; NANOCLUSTERS; OXYGEN; PHOTOELECTRON SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; TIN; TIN OXIDES; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

OXIDE FILMS;

EID: 79959484673 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3587174 Document Type: Article

Times cited : (55)

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