Investigation of annealing effects on indium tin oxide thin films by electron energy loss spectroscopy

Thin Solid Films

Volumn 359, Issue 2, 2000, Pages 244-250

  Zhu, Furong ^a   Huan, C H A ^b   Zhang, Keran ^b   Wee, A T S ^b  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; DIFFUSION IN SOLIDS; ELECTRON ENERGY LOSS SPECTROSCOPY; SEMICONDUCTING INDIUM COMPOUNDS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

GOTOELECTRONIC DEVICES;

SEMICONDUCTING FILMS;

EID: 0033908941     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00882-2     Document Type: Article

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