100 MHz oscillator based on a low polarization voltage capacitive Lamé-mode MEMS resonator

2010 IEEE International Frequency Control Symposium, FCS 2010

Volumn , Issue , 2010, Pages 174-178

  Colinet, Eric ^a   Arcamone, Julien ^a   Niel, Antoine ^a   Lorent, Emerick ^a   Hentz, Sébastien ^a   Ollier, Eric ^a  

^a CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DC BIAS VOLTAGE; FEED THROUGH; HIGH QUALITY FACTORS; LOW VACUUM; MEMS RESONATORS; MOTIONAL IMPEDANCE; POLARIZATION VOLTAGE;

MICROELECTROMECHANICAL DEVICES; OSCILLATORS (ELECTRONIC);

RESONATORS;

EID: 77957865773     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2010.5556350     Document Type: Conference Paper

References (11)

1. C. T.-C. Nguyen, "MEMS technology for timing and frequency control," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 54, no. 2, pp. 251-270, 2007.
2. V. Kaajakari et al, "Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator for Low-Phase-Noise Oscillator Applications", IEEE Electron Devices Letter, vol 25, no. 4, pp. 173-175, 2004.
3. K. Sundaresan et al, "A Low Phase Noise 100MHz Silicon BAW Reference Oscillator", in the Proc. of the IEEE Custom Integrated Circuit Conference, pp. 841-844, 2006.
4. Y-W Lin et al, "Series-Resonant VHF Micromechanical Resonator Reference Oscillators", IEEE Journal of Solid-State Circuits, vol. 39, no. 12, pp. 2477-2491, 2004.
5. D. Weinstein et al, "Internal dielectric transduction in bulk-mode resonators", IEEE Journal of Microelectromechanical Systems, vol. 18, no. 6, pp. 1401-1408, 2009.
6. J. Arcamone et al, "Efficient capacitive transduction of high-frequency micromechanical resonators by intrinsic compensation of parasitic feedthrough capacitances", accepted for publication in Applied Physics Letters, 2010.
7. E. Ollier et al, "IC integration-compatible single crystal silicon 100MHz MEMS resonators with 60nm air-gap and sub5V polarization voltage", in the Proc. of the MEMSWAVE 2010 conference, Otranto (Italy), 28-30th June 2010.
8. M. Akgul et al, "Oscillator far-from-carrier phase noise reduction via nano-scale gap tuning of micromechanical resonators", in the Proc. of the IEEE Transducers Conference, pp. 798-801, 2009.
9. D. B. Leeson, "A simple model of feedback oscillator noise spectrum", Proceeding of the IEEE, vol. 54, no. 2, pp. 329-330, 1966.
10. J. L. Lopez et al, Monolithically Integrated Double-Ended Tuning Fork-Based Oscillator with Low Bias Voltage in Air Conditions ", in the Proc. of the Eurosensors XXIII conference, vol. 1, pp. 614-617, 2009.
11. J. Arcamone et al. "Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS", Nanotechnology, vol. 19 (305302), 2008.