The origin of low-order and high-order impedance-coupled resonant modes in piezoelectric-excited millimeter-sized cantilever (PEMC) sensors: Experiments and finite element models

Sensors and Actuators, B: Chemical

Volumn 155, Issue 2, 2011, Pages 868-877

  Johnson, Blake N ^a   Mutharasan, Raj ^a  

^a Drexel University   (United States)

Author keywords

Frequency response; Impedance characterization; Mass change sensitivity; PEMC sensor; Resonance

Indexed keywords

AT RESONANCE; COMPOSITE LAYER; EIGEN FREQUENCIES; ELECTRICAL IMPEDANCE; ELECTRICAL IMPEDANCE CHANGES; ELECTRICAL IMPEDANCE MEASUREMENT; FINITE ELEMENT MODELS; FREQUENCY RANGES; GEOMETRIC ASYMMETRIES; HIGH ORDER MODE; HIGH-ORDER; IMPEDANCE CHARACTERIZATION; INTEGRATED CHARGE; LATERAL MOTION; LEAD ZIRCONATE TITANATE; LONGITUDINAL MODES; MASS-CHANGE SENSITIVITY; OFF-RESONANCE; PEMC SENSOR; PIEZOELECTRIC LAYERS; PZT; PZT LAYER; RESONANT MODE; SENSOR LAYERS; THREE-DIMENSIONAL (3D) FINITE ELEMENT MODELS;

ELECTRIC IMPEDANCE; ELECTRIC IMPEDANCE MEASUREMENT; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; NANOCANTILEVERS; NANOCOMPOSITE FILMS; PIEZOELECTRICITY; RESONANCE; SEMICONDUCTING LEAD COMPOUNDS; SENSORS; THREE DIMENSIONAL;

COUPLED CIRCUITS;

EID: 79957819992     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.01.063     Document Type: Article

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