Piezoelectrically actuated microcantilevers: An experimental nonlinear vibration analysis

Sensors and Actuators, A: Physical

Volumn 150, Issue 1, 2009, Pages 131-136

  Mahmoodi, S Nima ^a   Jalili, Nader ^b  

^a VIRGINIA POLYTECHNIC INSTITUTE AND STATE UNIVERSITY   (United States)

^b Clemson University   (United States)

Author keywords

Microcantilever; Microsensors; Nonlinear vibration; Piezoelectrically actuated microcantilevers

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; ELECTROMECHANICAL DEVICES; FREQUENCY RESPONSE; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; NATURAL FREQUENCIES; SENSORS; ZINC OXIDE;

COMPREHENSIVE ANALYSIS; DAILY GROWTHS; DYNAMICAL BEHAVIORS; EXPERIMENTAL TESTS; FUNDAMENTAL FREQUENCIES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROCANTILEVER; NON LINEARITIES; NONLINEAR FREQUENCY RESPONSE; NONLINEAR VIBRATION; NONLINEAR VIBRATION ANALYSIS; OUT OF PLANES; OUT-OF-PLANE VIBRATIONS; PIEZOELECTRICALLY ACTUATED MICROCANTILEVERS; QUADRATIC NON-LINEARITIES; SENSING DEVICES; SUB-HARMONICS; THIRD ORDERS; TORSIONAL MODES; ZNO;

COMPOSITE MICROMECHANICS;

EID: 60449083464     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.12.013     Document Type: Article

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