Self-excited force-sensing microcantilevers with piezoelectric thin films for dynamic scanning force microscopy

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 477-481

  Itoh, Toshihiro ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Dynamic operation mode; Piezoelectric microcantilevers; Scanning force microscopy; Self excitation; Static displacement

Indexed keywords

EID: 0001146439     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80007-6     Document Type: Article

References (10)

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