Flexural-torsional resonance mode of a chip cantilever system: Applications to nanomachining

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 2, 2009, Pages 958-963

  Voigt, Felix ^a   Krohs, Florian ^a   Gerbach, Ronny ^b  

^a UNIVERSITY OF OLDENBURG   (Germany)

^b FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AFM IMAGING; ATOMIC FORCE MICROSCOPES; ATOMIC-FORCE MICROSCOPIES; CANTILEVER SYSTEMS; CANTILEVER VIBRATIONS; CHIP SYSTEMS; FINITE-ELEMENT METHODS; FIRST HARMONICS; FLEXURAL VIBRATION MODES; FLEXURAL-TORSIONAL; LATERAL BENDING; MATERIAL PROCESSING; MECHANICAL VIBRATIONS; NANO-MACHINING; NANOMETER-SCALES; NATURAL MODES; RESONANCE MODES; SCANNING LASERS; TORSIONAL MOVEMENTS; TORSIONAL RESONANCE MODES;

NANOCANTILEVERS; RESONANCE; VIBRATING CONVEYORS; VIBRATIONS (MECHANICAL);

ATOMIC FORCE MICROSCOPY;

EID: 64549159448     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3054265     Document Type: Article

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