Sensor Application Using Longitudinal Mode of Screen-Printed PZT Cantilever

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 971-974

  Castille, C ^a   Dufour, I ^a   Maglione, M ^a   Debeda H ^a   Pellet, C ^a   Lucat, C ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

Cantilever; Gas Detection; Self Actuated piezoelectric; Thick film

Indexed keywords

GAS DETECTORS; NATURAL FREQUENCIES; THICK FILMS;

CANTILEVER; FREQUENCY RESOLUTIONS; GAS DETECTION; LONGITUDINAL VIBRATION MODES; LONGITUDINAL VIBRATIONS; SACRIFICIAL LAYER METHOD; SELF-ACTUATED PIEZOELECTRIC; THICK FILM TECHNOLOGY;

NANOCANTILEVERS;

EID: 71549163445     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.242     Document Type: Conference Paper

References (4)

1. Goeders, et al. Microcantilevers: sensing chemical interactions via mechanical motion. Chem. Rev 108 2 (2008) 522-542
2. Chun, et al. Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers. Sensors & Actuators: A. Physical 135 2 (2007) 857-862
3. Kanda. A flat type touch probe sensor using PZT thin film vibrator. Sensors and Actuators A: Physical 83 1-3 (2000) 67-75
4. Lucat C., et al. Microsystems elements based on free-standing thick-films made with a new sacrificial layer process. Microelectronics Reliability 48 6 (2008) 872-875