Behaviour of forbidden modes in the impedance characterization and modeling of piezoelectric microcantilevers

Sensors and Actuators, A: Physical

Volumn 136, Issue 1, 2007, Pages 417-425

  Vázquez, Javier ^a   Sanz, Pablo ^a   Sánchez Rojas, José Luis ^a  

^a UNIVERSITY OF CASTILLA LA MANCHA   (Spain)

Author keywords

Chemical sensor; Impedance; MEMS simulation; Microcantilever; Piezoelectric; Resonance

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; ELECTRIC IMPEDANCE; FINITE ELEMENT METHOD; MEMS; RESONANCE;

MASS DETECTION; MEMS SIMULATION; MICROCANTILEVERS; TORSIONAL MODES;

PIEZOELECTRIC DEVICES;

EID: 34247104010     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.11.005     Document Type: Article

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