Fabrication of normally-closed bidirectional micropumps in silicon-polymer technology featuring photopatternable silicone valve lips

Sensors and Actuators, A: Physical

Volumn 168, Issue 1, 2011, Pages 213-222

  Lemke, Thomas ^a   Biancuzzi, Giovanni ^a   Feth, Hagen ^a   Huber, Jochen ^a   Goldschmidtböing, Frank ^a   Woias, Peter ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Adhesive bonding; Micropump; Normally closed; Photopatternable silicone; Piezo multilayer

Indexed keywords

ADHESIVE BONDING; MICROPUMP; NORMALLY-CLOSED; PHOTOPATTERNABLE SILICONE; PIEZO-MULTILAYER;

COMPRESSION RATIO (MACHINERY); DRUG DELIVERY; FABRICATION; FLEXIBLE MANUFACTURING SYSTEMS; INNOVATION; MICROMACHINING; MULTILAYERS; PHOTORESISTS; POLYMERS; SILICON WAFERS; SILICONES; TECHNOLOGY; WAFER BONDING;

PUMPS;

EID: 79956363332     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.03.042     Document Type: Article

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