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Volumn 220, Issue 11, 2006, Pages 1619-1624

Development of a multi-material micropump

Author keywords

Bidirectional pumping; Chemical resistance; Cost efficient; Liquid and gases; Micropump

Indexed keywords

BUBBLES (IN FLUIDS); CHEMICAL RESISTANCE; DESIGN; DIAPHRAGMS; INJECTION MOLDING; MICROACTUATORS; PIEZOELECTRIC MATERIALS; VALVES (MECHANICAL);

EID: 33846326237     PISSN: 09544062     EISSN: None     Source Type: Journal    
DOI: 10.1243/0954406JMES289     Document Type: Article
Times cited : (7)

References (5)
  • 1
    • 0024101674 scopus 로고
    • A piezoelectric micropump based on micromachining of silicon
    • van Lintel, H. T. G., Van de Pol, F. C. M., and Bouwstra, S. A piezoelectric micropump based on micromachining of silicon. Sen. Actuators, 1988, 15, 153-167.
    • (1988) Sen. Actuators , vol.15 , pp. 153-167
    • van Lintel, H.T.G.1    Van de Pol, F.C.M.2    Bouwstra, S.3
  • 3
    • 33846280628 scopus 로고    scopus 로고
    • Available from
    • Available from http://www.thinxxs.de, 2006.
    • (2006)
  • 4
    • 33846280994 scopus 로고    scopus 로고
    • Available from
    • Available from http://www.bartels-mikrotechnik.de, 2006.
    • (2006)
  • 5
    • 33846315221 scopus 로고    scopus 로고
    • Available from
    • Available from http://www.star-micronics.co.jp, 2006.
    • (2006)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.