Self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 532-537

  Linnemmann, R ^a   Woias, P ^a   Senfft, C D ^a   Ditterich, J A ^a  

^a Fraunhofer Institut fur Festkorpertechnologie   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIAPHRAGMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; PRESSURE EFFECTS; PUMPS;

ACTUATION FREQUENCY; BUBBLE TOLERANT PUMPS; DIAPHRAGM ACTUATORS; PIEZOELECTRIC SILICON MICROPUMPS; SELF PRIMING PUMPS;

FLUIDIC DEVICES;

EID: 0031677322     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)