High pressure-resistance micropump using active and normally-closed valves

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 86-91

  Shinohara, Jun ^a   Suda, Masayuki ^a   Furuta, Kazuyoshi ^a   Sakuhara, Toshihiko ^a  

^a SEIKO INSTRUMENTS INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FLUIDIC DEVICES; PUMPS; SILICONES; SUBSTRATES; VALVES (MECHANICAL);

HIGH PRESSURE-RESISTANCE MICROPUMPS; NORMALLY-CLOSED VALVES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033724568     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (11)