Transparent conductive Ga-doped ZnO/Cu multilayers prepared on polymer substrates at room temperature

Solar Energy Materials and Solar Cells

Volumn 95, Issue 7, 2011, Pages 1826-1830

  Gong, Li ^a,b   Lu, Jianguo ^a   Ye, Zhizhen ^a  

^a ZHEJIANG UNIVERSITY   (China)

^b CHANGSHA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Magnetron sputtering; Multilayer; Polycarbonate; Transparent conductive oxides; Zinc oxide

Indexed keywords

CU FILMS; CU LAYERS; FIGURE OF MERIT; GA-DOPED; GA-DOPED ZNO; LAYER THICKNESS; MULTI-LAYER-COATING; POLYMER SUBSTRATE; ROOM TEMPERATURE; TRANSPARENT CONDUCTIVE; TRANSPARENT CONDUCTIVE OXIDES;

CARRIER CONCENTRATION; COATINGS; COPPER; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; GALLIUM; GALLIUM ALLOYS; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL MULTILAYERS; OPTICAL PROPERTIES; ZINC; ZINC OXIDE;

MULTILAYERS;

EID: 79955478249     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2011.02.004     Document Type: Article

References (40)

1. G. Leftheriotis, S. Papaefthiniou, and P. Yianoulis Development of multilayer transparent conductive coatings Solid State Ionics 136137 2000 655 661 (Pubitemid 32029601)
2. A. Kloppel, B. Meyer, and J. Trube Influence of substrate temperature and sputtering atmosphere on electrical and optical properties of double silver layer systems Thin Solid Films 392 2001 311 314 (Pubitemid 32618204)
3. A. Kloppel, W. Kriegseis, B.K. Meyer, A. Scharmann, C. Daube, J. Stollenwerk, and J. Trube Dependence of the electrical and optical behaviour of ITOsilverITO multilayers on the silver properties Thin Solid Films 365 2000 139 146 (Pubitemid 30587685)
4. M. Sawada, M. Higuchi, S. Kondo, and H. Saka Characteristics of indiumtin-oxide/silver/indiumtin-oxide sandwich films and their application to simple-matrix liquid-crystal displays Jpn. J. Appl. Phys. 40 2001 3332 3336 (Pubitemid 32676971)
5. Y.S. Jung, Y.W. Choi, H.C. Lee, and D.W. Lee Effects of thermal treatment on the electrical and optical properties of silver-based indium tin oxide/metal/indium tin oxide structures Thin Solid Films 440 2003 278 284
6. D.R. Sahu, S.Y. Lin, and J.L. Huang ZnO/Ag/ZnO multilayer films for the application of a very low resistance transparent electrode Appl. Surf. Sci. 252 2006 7509 7514 (Pubitemid 44233931)
7. C.S. Moon, Y.M. Chung, W.S. Jung, and J.G. Han The low temperature process design for Al doped ZnO film synthesis on polymer Surf. Coat. Technol. 201 2007 5035 5038 (Pubitemid 46158542)
8. S. Fernandez, and F.B. Naranjo Optimization of aluminum-doped zinc oxide films deposited at low temperature by radio-frequency sputtering on flexible substrates for solar cell applications Sol. Energy Mater. Sol. Cells 94 2010 157 163
9. E. Fortunato, P. Nunes, A. Marques, D. Costa, H. Aguas, I. Ferreira, M.E.V. Costa, M.H. Godinaho, P.L. Almeida, J.P. Borges, and R. Martins Transparent, conductive ZnO:Al thin film deposited on polymer substrates by RF magnetron sputtering Surf. Coat. Technol. 151152 2002 247 251 (Pubitemid 34231636)
10. E. Fortunato, A. Goncalves, V. Assuncao, A. Marques, H. Aguas, L. Pereira, I. Ferreira, and R. Martins Growth of ZnO:Ga thin films at room temperature on polymeric substrates: thickness dependence Thin Solid Films 442 2003 121 126
11. A. Miyake, T. Yamada, H. Makino, N. Yamamoto, and T. Yamamoto Effect of substrate temperature on structural, electrical and optical properties of Ga-doped ZnO films on cycro olefin polymer substrate by ion plating deposition Thin Solid Films 517 2008 1037 1041
12. A. Lambertz, C. Roβ, H. Siekmann, G. Stollwerk, F. Finger. Thin Film Silicon Solar Cells on Transparent and Flexible Plastic Films, Proceedings of the 21st European Photovoltaic Solar Energy Conference (21st EU-PVSEC), Dresden, Germany, 2006, p. 1771.
13. L. Gong, J.G. Lu, and Z.Z. Ye Transparent and conductive Ga-doped ZnO films grown by RF magnetron sputtering on polycarbonate substrates Sol. Energy Mater. Sol. Cells 94 2010 937 941
14. L. Gong, J.G. Lu, and Z.Z. Ye Room-temperature growth and optoelectronic properties of GZO/ZnO bilayer films on polycarbonate substrates by magnetron sputtering Sol. Energy Mater. Sol. Cells 94 2010 1282 1285
15. Y.S. Park, H.K. Kim, S.W. Jeong, and W.J. Cho Highly flexible indium zinc oxide electrode grown on PET substrate by cost efficient roll-to-roll sputtering process Thin Solid Films 518 2010 3071 3074
16. D.R. Sahu, and J.L. Huang Development of ZnO-based transparent conductive coatings Sol. Energy Mater. Sol. Cells 93 2009 1923 1927
17. D.R. Sahu, and J.L. Huang Dependence of film thickness on the electrical and optical properties of ZnOCuZnO multilayers Appl. Surf. Sci. 253 2006 915 918 (Pubitemid 44894231)
18. D.R. Sahu, and J.L. Huang Characteristics of ZnOCuZnO multilayer films on copper layer properties Appl. Surf. Sci. 253 2006 827 832 (Pubitemid 44894216)
19. H.K. Park, J.W. Kang, S.I. Na, D.Y. Kim, and H.K. Kim Characteristics of indium-free GZO/Ag/GZO and AZO/Ag/AZO multilayer electrode grown by dual target DC sputtering at room temperature for low-cost organic photovoltaics Sol. Energy Mater. Sol. Cells 93 2009 1994 2002
20. H.K. Park, J.A. Jeong, Y.S. Park, S.I. Na, D.Y. Kim, and H.K. Kim Room-temperature indium-free Ga:ZnO/Ag/Ga:ZnO multilayer electrode for organic solar cell applications Electrochem. Solid-State Lett. 12 8 2009 H309 H311
21. A. Indluru, and T.L. Alford Improved conductivity and mechanism of carrier transport in zinc oxide with embedded silver layer J. Appl. Phys. 103 2009 013708-1-8 2009
22. K. Sivaramakrishnan, and T.L. Alford Metallic conductivity and the role of copper in ZnO/Cu/ZnO thin films for flexible electronics Appl. Phys. Lett. 94 2009 052104-1-3 2009
23. K. Sivaramakrishnan, N.D. Theodore, J.F. Moulder, and T.L. Alford The role of copper in ZnO/Cu/ZnO thin films for flexible electronics J. Appl. Phys. 106 2009 063510-1-8
24. D.R. Cairns, D.C. Paine, G.P. Crawford, SID01 Digest, 2001, p. 654.
25. O. Nakagawara, Y. Kishimoto, K. Seto, Y. Koshido, Y. Yoshino, and T. Makino Moisture-resistant ZnO transparent conductive films with Ga heavy doping Appl. Phys. Lett. 89 2006 091904-1-3
26. V. Bhosle, A. Tiwari, and J. Narayan Metallic conductivity and metal-semiconductor transition in Ga-doped ZnO Appl. Phys. Lett. 88 2006 032106-1-3
27. O. Bamiduro, H. Mustafa, R. Mundle, R.B. Konda, and A.K. Pradhan Metal-like conductivity in transparent Al:ZnO films Appl. Phys. Lett. 90 2007 252108-1-3
28. X.H. Yu, J. Ma, F. Ji, Y.H. Wang, C.F. Cheng, and H.L. Ma Thickness dependence of properties of ZnO:Ga films deposited by rf magnetron sputtering Appl. Surf. Sci. 245 2005 310 315 (Pubitemid 40497289)
29. V. Assuncao, E. Fortunato, and A. Marques New challenges on gallium-doped zinc oxide films prepared by r.f. magnetron sputtering Thin Solid Films 442 2003 102 106
30. Q.B. Ma, Z.Z. Ye, H.P. He, L.P. Zhu, J.Y. Huang, Y.Z. Zhang, and B.H. Zhao Influence of annealing temperature on the properties of transparent conductive and near-infrared reflective ZnO:Ga films Scr. Mater. 58 2008 21 24
31. S. Kim, W.I. Lee, E.H. Lee, S.K. Hwang, and C. Lee Dependence of the resistivity and the transmittance of sputter-deposited Ga-doped ZnO films on oxygen partial pressure and sputtering temperature J. Mater. Sci. 42 2007 4845 4849 (Pubitemid 47142106)
32. V. Assuncao, E. Fortunato, A. Marques, H. Aguas, I. Ferreira, M.E.V. Costa, and R. Martins Influence of the deposition pressure on the properties of transparent and conductive ZnO:Ga thin-film produced by r.f. sputtering at room temperature Thin Solid Films 427 2003 401 405
33. A. Suzuki, T. Matsushita, T. Aoki, Y. Yoneyama, and M. Okuda Micro-textured milky ZnO:Ga thin films fabricated by pulsed laser deposition using second-harmonic-generation of Nd: YAG laser Jpn. J. Appl. Phys. 38 1999 L71 L73
34. B. Sang, K. Kushiya, D. Okumura, and O. Yamase Performance improvement of CIGS-based modules by depositing high-quality Ga-doped ZnO windows with magnetron sputtering Sol. Energy Mater. Sol. Cells 67 2001 237 245 (Pubitemid 32092030)
35. K.T.R. Reddy, T.B.S. Reddy, I. Forbes, and R.W. Miles Highly oriented and conducting ZnO:Ga layers grown by chemical spray pyrolysis Surf. Coat. Technol. 151152 2002 110 113 (Pubitemid 34231613)
36. W.B. Pearson Crystal Chemistry and Physics of Metals and Alloys 1972 Wiley New York p 76
37. H. Kato, M. Sano, K. Miyamoto, and T. Yao Growth and characterization of Ga-doped ZnO layers on a-plane sapphire substrates grown by molecular beam epitaxy J. Cryst. Growth 237239 2002 538 543 (Pubitemid 34544312)
38. H.J. Ko, Y.F. Chen, S.K. Hong, H. Wenisch, T. Yao, and D.C. Look Ga-doped ZnO films grown on GaN templates by plasma-assisted molecular-beam epitaxy Appl. Phys. Lett. 77 2000 3761 3763
39. H. Ehrenreich, and H.R. Philipp Optical properties of Ag and Cu Phys. Rev. 128 1962 1622 1629
40. G. Haacke New Figure of merit for transparent conductors J. Appl. Phys. 47 1976 4086 4089