Highly flexible indium zinc oxide electrode grown on PET substrate by cost efficient roll-to-roll sputtering process

Thin Solid Films

Volumn 518, Issue 11, 2010, Pages 3071-3074

  Park, Yong Seok ^a   Kim, Han Ki ^a   Jeong, Soon Wook ^b   Cho, Woon Jo ^c  

^a Kyung Hee University   (South Korea)

^b Kumoh National Institute of Technology   (South Korea)

^c Korea Institute of Science and Technology   (South Korea)

Author keywords

Flexibility; Indium zinc oxide (IZO); Roll to roll sputter; Sheet resistance; Transparency

Indexed keywords

AMORPHOUS STRUCTURES; COST-EFFICIENT; DC POWER; DRUM SYSTEMS; ELECTRICAL AND OPTICAL PROPERTIES; FLEXIBLE ELECTRODES; FLOW RATIOS; HIGH TRANSPARENCY; INDIUM ZINC OXIDE (IZO); INDIUM ZINC OXIDES; ITO ELECTRODES; LOW RESISTANCE; OPTICAL TRANSMITTANCE; OPTIMIZED CONDITIONS; PET SUBSTRATE; ROLL TO ROLL; ROLL-TO-ROLL SPUTTER; ROLLING SPEED; SPUTTERING PROCESS; SPUTTERING SYSTEMS; WORKING PRESSURES;

ELECTRIC POWER MEASUREMENT; ELECTRIC PROPERTIES; ELECTRIC RESISTANCE; INDIUM; POLYETHYLENE TEREPHTHALATES; SHEET RESISTANCE; SUBSTRATES; THERMOPLASTICS; TRANSPARENCY; ZINC; ZINC OXIDE;

ELECTRODES;

EID: 77649118419     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.09.197     Document Type: Article

References (16)

1. Brabec C.J., Sariciftci N.S., and Hummelen J.C. Adv. Funct. Mater. 11 (2001) 15
2. Shaheen S.E., Brabec S.J., Sariciftci N.S., Padinger F., Fromherz T., and Hummelen J.C. Appl. Phys. Lett. 78 (2001) 841
3. Al-lbrahim M., Roth H.K., and Sensfuss S. Appl. Phys. Lett. 85 (2004) 1481
4. Kang J.-W., Jeong W.-I., Kim J.-J., Kim D.-G., and Lee G.-H. Electrochem. Solid-State Lett. 10 (2007) J75
5. Han H., Adams D., Mayer J.W., and Alford T.L. J. Appl. Phys. 98 (2005) 083705-1
6. Marcel C., Naghavi N., Couturier G., Salardenne J., and Tarascon J.M. J. Appl. Phys 91 (2002) 4291
7. Lewis J., Grego S., Chalamala B., Vick E., and Temple D. Appl. Phys. Lett. 85 (2004) 3450
8. Cains D.R., Witte II R.P., Sparacin D.K., Sachsman S.M., Paine D.C., and Crawford G.P. Appl. Phys. Lett. (2000) 76
9. Carcia P.F., McLean R.S., Reilly M.H., Li Z.G., Pillione L.J., and Messier R.F. Appl. Phys. Lett. 81 (2002) 1800
10. Carcia P.F., McLean R.S., Reilly M.H., Li Z.G., Pillione L.J., and Messier R.F. J. Appl. Phys. 83 (1998) 2631
11. Izu M., and Ellison T. Sol. Energy Mater. Sol. Cells 78 (2003) 613
12. Gregory P. Flexible Flat Panel Displays. 1st ed. (2005), John Wiley & Sons. Inc, England (chapter 21)
13. Bea J.-H., Moon J.-M., Kang J.-W., Park H.-D., Kim J.-J., Cho W.-J., and Kim H.-K. J. Electrochem. Soc. 154 (2007) J81
14. Pan H.C., Shiao M.H., Su C.Y., and Hsiao C.N. J. Vac. Sci. Technol. A 23 (2005) 1187
15. Haacke G. J. Appl. Phys. 47 (1976) 4086
16. Cho S.-W., Jeong J.-A., Bae J.-H., Moon J.-M., Choi K.-H., Jeong S.-W., Park N.-J., Kim J.-J., Lee S.-H., Kang J.-W., Yi M.-S., and Kim H.-K. Thin Solid Films 516 (2008) 7881