Nano-factories in plasma: Present status and outlook

Journal of Physics D: Applied Physics

Volumn 44, Issue 17, 2011, Pages

  Shiratani, Masaharu ^a   Koga, Kazunori ^a   Iwashita, Shinya ^a   Uchida, Giichiro ^a   Itagaki, Naho ^a   Kamataki, Kunihiro ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

KEY CONTROL; MINIATURE VERSION; NANOBLOCKS; PRESENT STATUS; REACTIVE PLASMAS; STRUCTURE CONTROL;

AGGLOMERATION;

PLASMAS;

EID: 79954575981     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/17/174038     Document Type: Article

References (61)

1. Ostrikov K 2008 Plasma Nanoscience: Basic Concepts and Applications of Deterministic Nanofabrication (Weinheim: Wiley-VCH)
2. Shiratani M, Koga K, Uchida G, Itagaki N and Kamataki K 2010 Proc. IEEE Tencon (Fukuoka, Japan) pp 12-16
3. Shiratani M, Kakeya T, Koga K, Watanabe Y and Kondo M 2005 Trans. Mater. Res. Soc. Japan 30 307
4. Shiratani M, Koga K, Ando S, Inoue T, Watanabe Y, Nunomura S and Kondo M 2007 Surf. Coat. Technol. 201 5468
5. Nunomura S, Koga K, Shiratani M, Watanabe Y, Morisada Y, Matsuki N and Ikeda S 2005 Japan. J. Appl. Phys. 44 L1509
6. Iwashita S, Morita M, Koga K and Shiratani M 2008 Japan. J. Appl. Phys. 47 6875
7. Majumder D D, Banerjee R, Ulrichs C, Mewis I and Goswami A 2007 IETE Tech. Rev. 24 9
8. Rutkevych P P, Ostrikov K and Xu S 2007 Phys. Plasmas 14 043502
9. Joachim C, Gimzewski J K and Airam A 2000 Nature 408 541
10. Gill V, Guduru P R and Sheldon B W 2008 Int. J. Solids Structures 45 943
11. Ennen I et al 2007 J. Appl. Phys. 102 013910
12. Khanduja N, Selvarasah S, Chen C L, Dokmeci M R, Xiong X, Makaram P and Busnaina A 2007 Appl. Phys. Lett. 90 083105
13. Nel A, Xia T, Madler L and Li N 2006 Science 311 622
14. Wang X, Gidwani A, Girshick S L and Mcmurry P H 2005 Aerosol Sci. Technol. 39 624
15. Heeren A, Luo C P, Henschel W, Fleisher M and Kiern D P 2007 Microelectron. Eng. 84 1706
16. Wildoer J W G, Venema L C, Rinzler A G, Smalley R E and Dekker C 1998 Nature 391 59
17. Balzani V, Credi A and Venturi M 2007 Nanotoday 2 18
18. http://www.crnano.org/whatis.htm
19. Watanabe Y, Shiratani M, Kubo Y, Ogawa I and Ogi S 1988 Appl. Phys. Lett. 53 1263
20. Shiratani M, Matsuo S and Watanabe Y 1991 Japan. J. Appl. Phys. 30 1887
21. Bouchoule A, Plain A, Boufendi L, Blondeau J Ph and Laure C 1991 Japan. J. Appl. Phys. 30 1887
22. Boufendi L, Plain A, Blondeau J Ph, Bouchoule A, Laure C and Toogood M 1992 Appl. Phys. Lett. 60 169
23. Watanabe Y, Shiratani M, Kawasaki H, Singh S, Fukuzawa T, Ueda Y and Ohkura H 1990 J. Vac. Sci. Technol. A 14 540
24. Shiratani M, Fukuzawa T and Watanabe Y 1999 Japan. J. Appl. Phys. 38 4542
25. Matsuoka Y, Shiratani M, Fukuzawa T, Watanabe Y and Kim K S 1999 Japan. J. Appl. Phys. 38 4556
26. Shiratani M, Maeda S, Koga K and Watanabe Y 2000 Japan. J. Appl. Phys. 39 287
27. Watanabe Y, Shiratani M, Fukuzawa T and Koga K 2000 J. Tech. Phys. 41 505
28. Koga K, Matsuoka Y, Tanaka K, Shiratani M and Watanabe Y 2000 Appl. Phys. Lett. 77 196
29. Watanabe Y 2006 J. Phys. D: Appl. Phys. 39 R329
30. Nunomura S, Kita M, Koga K, Shiratani M and Watanabe Y 2006 J. Appl. Phys. 99 083302
31. Koga K, Iwashita S and Shiratani M 2007 J. Phys. D: Appl. Phys. 40 2267
32. Shiratani M, Koga K, Iwashita S and Nunomura S 2008 Faraday Discuss. 137 127
33. Iwashita S, Miyata H, Matsuzaki H, Koga K and Shirarani M 2009 J. Plasma Fusion Res. Ser. 8 0582
34. Ostrikov K 2005 Rev. Mod. Phys. 77 489
35. Meyyappan M, Delzeit L, Cassell A and Hash D 2003 Plasma Sources Sci. Technol. 12 205
36. Okada T, Kaneko T, Hatakeyama R and Tohji K 2006 Chem. Phys. Lett. 417 288
37. Mozetic M, Cvelbar U, Sunkara M K and Vaddiraju S 2005 Adv. Mater. 17 2138
38. Miyahara H, Iwashita S, Miyata H, Matsuzaki H, Koga K and Shirarani M 2009 J. Plasma Fusion Res. Ser. 8 700
39. Uchida G, Sato M, Kawashima Y, Yamamoto K, Nakahara K, Yamashita D, Matsuzaki H, Kamataki K, Itagaki N, Koga K, Shiratani M and Kondo K 2010 Proc. Nano Micro Conf. (Kitakyushu, Japan) in CD-ROM
40. Kawashima Y, Yamamoto K, Sato M, Nakahara K, Matsunaga T, Nakamura W M, Yamashita D, Matsunaga H, Uchida G, Kamataki K, Itagaki N, Koga K, Shiratani M and Kondo K 2010 Proc. 35th IEEE Photovoltaic Specialist Conf. (Honolulu, HI) pp 003347-51
41. Hanna M C and Nozik A J 2006 J. Appl. Phys. 100 074510
42. Nozik A J 2001 Annu. Rev. Phys. Chem. 52 193
43. Nozik A J 2002 Physica E 14 115
44. Sreseli O M, El'tsina O S, Belyakov L V and Goryachev D N 2009 Appl. Phys. Lett. 95 031914
45. Nunomura S, Shiratani M, Koga K, Kondo M and Watanabe Y 2008 Phys. Plasmas 15 080703
46. Rutkevych P P, Ostrikov K, Xu S and Vladimirov S V 2004 J. Appl. Phys. 96 4421
47. Iwashita S, Koga K and Shiratani M 2007 Surf. Coat. Technol. 201 5701
48. Iwashita S, Miyata H, Koga K, Matsuzaki H, Shiratani M and Akiyama M 2009 Proc. 31st Int. Symp. on Dry Process (Busan, Korea) pp 99-100
49. Miyoshi H, Matsui H, Oku Y, Tanaka H, Yamada K, Mikami N, Tanaka S, Hata N and Kikkawa T 2004 Japan. J. Appl. Phys. 43 498
50. Maex K, Baklanov M R, Shamiryan D, Lacopi F, Brongersma S H and Yanovitskaya Z S 2003 J. Appl. Phys. 93 8793
51. Lacopi F et al 2006 J. Appl. Phys. 99 053511
52. Johnson M, Li Z, Wang J and Yan Y 2007 Thin Solid Films 515 3164
53. Ogunsola O and Ehrman S 2008 J. Nanopart. Res. 10 31
54. Yano K, Ishi T, Hashimoto T, Kobayashi T, Murai F and Seki K 1994 IEEE Trans. Electron Devices 41 1628
55. Takahashi Y, Nagase M, Namatsu H, Kurihara K, Iwdate K, Nakajima Y, Horiguchi S, Murase K and Tabe M 1995 Electron. Lett. 31 136
56. Likharev K K 1999 Proc. IEEE 87 606
57. Veinot J G G, Ginzburrg M and Pietro W J 1997 Chem. Mater. 9 2117
58. Hagn M, Zrenner A, Bohm G and Weimann G 1995 Appl. Phys. Lett. 67 232
59. High A A, Novitskaya E E, Butov L V, Hanson M and Gossard A C 2008 Science 321 229
60. Lee Y L and Lo Y S 2009 Adv. Funct. Mater. 19 604
61. Uchida G, Yamamoto K, Kawashima Y, Sato M, Nakahara K, Kamataki K, Itagaki N, Koga K, Kondo M and Shiratani M Phys. Status Solidi c, at press