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Volumn 137, Issue , 2007, Pages 127-138

Rapid transport of nano-particles having a fractional elementary charge on average in capacitively-coupled rf discharges by amplitude-modulating discharge voltage

(4) Shiratani, Masaharu a Koga, Kazunori a Iwashita, Shinya a Nunomura, Syota b

a KYUSHU UNIVERSITY (Japan)

b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 35348858615 PISSN: 13596640 EISSN: 13645498 Source Type: Journal
DOI: 10.1039/b704910b Document Type: Article

Times cited : (23)

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