Study of nanoimprint pattern transfer on hydrogen silsesquioxane

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 4, 2006, Pages 1934-1940

  Chen, Sun Zen ^a   Liu, Jen Fu ^a   Chen, Henry J H ^b   Huang, Fon Shan ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL CHI NAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AROMATIC COMPOUNDS; DEGRADATION; DIFFRACTION GRATINGS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; HYDROGEN; KETONES; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

BAKING TEMPERATURES; HYDROGEN SILSESQUIOXANE; METHYLISOBUTYLKETONE (MIBK); NANOIMPRINT PATTERN TRANSFER;

NANOTECHNOLOGY;

EID: 33746477557     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2221314     Document Type: Article

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