Glass nanostructures fabricated by soft thermal nanoimprint

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 4, 2007, Pages

  Peroz, C ^a   Heitz, C ^a   Barthel, E ^a   Sondergrd E ^a   Goletto, V ^a  

^a SAINT GOBAIN RECHERCHE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; SILICA; SOL-GEL PROCESS; THIN FILMS;

GLASS NANOSTRUCTURES; INORGANIC-ORGANIC SOL-GEL THIN FILMS; SOFT THERMAL NANOIMPRINT; SOL-GEL CHEMISTRY;

NANOSTRUCTURED MATERIALS;

EID: 34547571226     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2748791     Document Type: Article

References (18)

1. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Science 272, 85 (1996).
2. M. D. Austin, H. Ge, W. Wu, M. Li, Z. Yu, D. Wasserman, S. A. Lyon, and S. Y. Chou, Appl. Phys. Lett. 84, 5299 (2004).
3. S. Moller and S. R. Forrest, J. Appl. Phys. 91, 3324 (2002).
4. A. Fuchs, M. Bender, U. Plachetka, U. Hermanns, and H. Kurz, J. Vac. Sci. Technol. B 23, 2925 (2005).
5. W. S. Kim, J. H. Lee, S. Y. Shin, B. S. Bae, and Y. C. Kim, IEEE Photonics Technol. Lett. 16, 1888 (2004).
6. Y. Kurashima, M. Komuro, H. Hiroshima, J. Taniguchi, and I. Miyamoto, Jpn. J. Appl. Phys., Part 1 42, 3871 (2003).
7. X. C. Yuan, W. X. Yu, M. He, J. Bu, W. C. Cheong, H. B. Niu, and X. Peng, Appl. Phys. Lett. 86, 114102 (2005).
8. C. Peroz, J. C. Galas, J. Shi, L. Le Gratiet, and Y. Chen, Appl. Phys. Lett. 89, 243109 (2006).
9. R. Brendel, A. Gier, M. Menning, H. Schmidt, and J. H. Werner, J. Non-Cryst. Solids 218, 391 (1997).
10. C. Marzolin, S. P. Smith, M. Prentiss, and G. M. Whitesides, Adv. Mater. (Weinheim, Ger.) 10, 571 (1998).
11. M. Li, H. Tan, L. Chen, J. Wang, and S. Y. Chou, J. Vac. Sci. Technol. B 21, 660 (2003).
12. C. Harnagea, M. Alexe, J. Schilling, J. Choi, R. B. Wehrspohn, D. Hesse, and U. Gosele, Appl. Phys. Lett. 83, 1827 (2003).
13. M. Okinaka, K. Tsukagoshi, and Y. Aoyagi, J. Vac. Sci. Technol. B 24, 1402 (2006).
14. G. Rizzo, P. Barila, S. Galvagno, G. Neri, A. Arena, S. Patane, and G. Saitta, J. Sol-Gel Sci. Technol. 26, 1017 (2003).
15. J. Shi, C. Peroz, D. Peyrade, J. Salari, M. Belotti, W. H. Huang, and Y. Chen, Microelectron. Eng. 83, 1664 (2006).
16. H. Schmid and B. Michel, Macromolecules 33, 3042 (2000).
17. J. Gallardo, P. Galliano, and A. Duran, J. Sol-Gel Sci. Technol. 19, 393 (2000).
18. F. Brunet, J. Non-Cryst. Solids 231, 58 (1998).