Self-organized antireflecting nano-cone arrays on Si (100) induced by ion bombardment

Journal of Applied Physics

Volumn 109, Issue 5, 2011, Pages

  Zhou, Jing ^a   Hildebrandt, Meret ^a,b   Lu, Ming ^a  

^a FUDAN UNIVERSITY   (China)

^b UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE HEIGHT; CRYSTALLINITIES; CRYSTALLOGRAPHIC ORIENTATIONS; ELECTRON SPECTRUM; HIGH RESOLUTION; ION ENERGIES; METAL ATOMS; NAKED-EYE; NANO-STRUCTURED; NANOCONE; NORMAL INCIDENCE; SELF-ORGANIZED; SI SURFACES; SI(1 0 0); WAVELENGTH RANGES;

ATOMIC SPECTROSCOPY; CHROMIUM; CRYSTAL ATOMIC STRUCTURE; IONS; NANOSTRUCTURES; SILICON;

ION BOMBARDMENT;

EID: 79953007764     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3560539     Document Type: Article

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