Parylene etching techniques for microfluidics and biomems

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 568-571

  Meng, Ellis ^a   Tai, Yu Chong ^b  

^a University of Southern California ^*  (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FLUIDIC DEVICES; MICROELECTROMECHANICAL DEVICES; PLASMA ETCHING; POLYCRYSTALLINE MATERIALS; THERMOPLASTICS;

CRYSTALLINE POLYMERS; MICROFLUIDICS; PARYLENE ETCHING; VAPOR DEPOSITION POLYMERIZATION (VDP);

REACTIVE ION ETCHING;

EID: 26844441951     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)

1. Specialty Coating Systems. Discovery and Early History of Parylene. http://www.scscookson.com/parylene/origin.htm.
2. X.Q. Wang and Y.C. Tai, "A Normally Closed In-Channel Micro Check Valve", in MEMS 2000. Miyazaki, Japan, 2000.
3. J. Xie, Q. He, Y.-C. Tai, J. Liu, and T. Lee, "Integrated Electrospray Chip for Mass Spectrometry", in mTAS 2002. Nara, Japan, 2002, pp. 709-711.
4. J. Xie, J. Shih, and Y.-C. Tai, "Integrated Surface-Micromachined Mass Flow Controller", in MEMS '03. Kyoto, Japan, 2003.
5. X. Yang, J.M. Yang, X.-Q. Wang, E. Meng, Y.-C. Tai, and C.-M. Ho, "Micromachined Membrane Particle Filters", in MEMS '98. Heidelberg, Germany, 1998.
6. 3 dry release technology for large freestanding parylene microstructures and electrostatic actuators", Sensors & Actuators A, 98, pp. 771-5, 2002.
7. J.I. Kroschwitz, ed. Kirk-Othmer Encyclopedia of Chemical Technology, John Wiley & Sons, Inc.: New York, 1998.
8. Q. He, E. Meng, Y.-C. Tai, C.M. Rutherglen, J. Erickson, and J. Pine, "Parylene Neuro-Cages for Live Neural Networks Study", in Transducers 2003. Boston, MA, 2003, pp. 995-998.
9. E. Meng, Y.-C. Tai, J. Erickson, and J. Pine, "Parylene Technology for Mechanically Robust Neuro-Cages", in Micro Total Analysis Systems 2003. Squaw Valley, CA, 2003, pp. 1109-1112.
10. Specialty Coating Systems, Solvent Resistance of Parylene. 2001.
11. R. Sabeti, E.M. Charlson, and E.J. Charlson, "Selective Deposition of Parylene", Polymer Communications, 30, pp. 166-169, 1989.
12. G.E. Loeb, R.A. Peck, and J. Martyniuk, "Toward the ultimate metal microelectrode", J. Neurosci Methods, 63, pp. 175-83, 1995.
13. E.M. Schmidt, M.J. Bak, and P. Christensen, "Laser exposure of Parylene-C insulated microelectrodes", J Neurosci Methods, 62, pp. 89-92, 1995.
14. X.-Q. Wang, Q. Lin, and Y.-C. Tai, "A Parylene Micro Check Valve", in MEMS '99. Orlando, FL, 1999, pp. 177-182.
15. T.E. Nowlin and D.F. Smith, Jr., "Surface Characterization of Plasma-Treated Poly-p-Xylylene Films", Journal of Applied Polymer Science, 25, pp. 1619-1632, 1980.
16. B. Ratier, Y.S. Jeong, A. Moliton, and P. Audebert, "Vapor deposition polymerization and reactive ion beam etching of poly(p-xylylene) films for waveguide applications", Optical Materials, 12, pp. 229-233, 1999.
17. J.T.C. Yeh and K.R. Grebe, "Patterning of poly-paraxylylenes by reactive ion etching", Journal of Vacuum Science & Technology A-Vacuum Surfaces & Films, 1, pp. 604-608, 1983.
18. N. Majid, S. Dabral, and J.F. McDonald, "The Parylene-Aluminum Multilayer Interconnection System for Wafer Scale Integration and Wafer Scale Hybrid Packaging", Journal of Electronic Materials, 18, pp. 301-11, 1989.
19. J.D. Zahn, K.J. Gabriel, and G.K. Fedder, "A Direct Plasma Etch Approach to High Aspect Ratio Polymer Micromachining with Applications in BioMEMS and CMOS-MEMS", in MEMS 2002. Las Vegas, Nevada, 2002, pp. 137-140.
20. T.E.F.M. Standaert, P.J. Matsuo, X. Li, G.S. Oehrlein, T.-M. Lu, R. Gutmann, C.T. Rosenmayer, J.W. Bartz, J.G. Langan, and W.R. Entley, "High-density plasma patterning of low dielectric constant polymers: A comparision between polytetrafluoroethylene, parylene-N, and poly(arylene ether)", Journal of Vacuum Science & Technology A, 19, pp. 435-446, 2001.
21. R.R.A. Callahan, G.B. Raupp, and S.P. Beaudoin, "Effects of gas pressure and substrate temperature on the etching of parylene-N using a remote microwave oxygen plasma", Journal of Vacuum Science & Technology B, 19, pp. 725-731, 2001.
22. R.R.A. Callahan, K.G. Pruden, G.B. Raupp, and S.P. Beaudoin, "Downstream oxygen etching characteristics of polymers", Journal of Vacuum Science & Technology B, 21, pp. 1496-1500, 2003.
23. B.N. Chapman and V.J. Minkiewicz, "Flow rate effects in plasma etching", Journal of Vacuum Science & Technology, 15, pp. 329-332, 1978.