Glass-based microfluidic device fabricated by parylene wafer-to-wafer bonding for impedance spectroscopy

Sensors and Actuators, A: Physical

Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 162-171

  Poenar, Daniel P ^a   Iliescu, Ciprian ^b   Carp, Mihaela ^a   Pang, Ah Ju ^b   Leck, Kwong Joo ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

Author keywords

Electrochemical impedance spectroscopy (EIS); HepG2 cells; Microfluidics; Parylene bonding; Spray coating photolithography; Thru wafer HF etching of glass

Indexed keywords

ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; GLASS; MICROFLUIDICS; OLEFINS;

GLASS WAFERS; HEPG2 CELLS; PARYLENE BONDING; SPRAY COATING PHOTOLITHOGRAPHY;

FLUIDIC DEVICES;

EID: 34548238293     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.009     Document Type: Article

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