Theoretical and experimental studies on the parylene diaphragms for microdevices

Microsystem Technologies

Volumn 11, Issue 1, 2005, Pages 11-15

  Sim, W ^a   Kim, B ^b   Choi, B ^c   Park, J O ^a  

^a Intelligent Microsystem Center   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

^c Sogang University   (South Korea)

Author keywords

Diaphragm; FEM; Optimum shape; Parylene; Thermal stress

Indexed keywords

ANISOTROPY; COMPUTER SIMULATION; ETCHING; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; THERMAL STRESS;

ANISOTROPIC ETCHING; CIRCULAR CORRUGATION; OPTIMUM SHAPE; PARYLENE;

DIAPHRAGMS;

EID: 10844223529     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0342-7     Document Type: Article

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