A low cost and hybrid technology for integrating silicon sensors or actuators in polymer microfluidic systems

Journal of Micromechanics and Microengineering

Volumn 18, Issue 1, 2008, Pages

  Charlot, Samuel ^a   Gué, Anne Marie ^a   Tasselli, Josiane ^a   Marty, Antoine ^a   Abgrall, Patrick ^a   Estève, Daniel ^a  

^a UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COST EFFECTIVENESS; LAMINATING; MICROFLUIDICS; PHOTOLITHOGRAPHY; SCREEN PRINTING;

FLUID LEAKS; PDMS; PLANARIZING; POLYMER INTERFACES; SILICON DEVICES;

SILICON SENSORS;

LAMINATION; LITHOGRAPHY; SENSORS; SILICON; SILK SCREEN PRINTING;

EID: 41849107513     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/1/017003     Document Type: Article

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