High-performance temperature-programmed microfabricated gas chromatography columns

Journal of Microelectromechanical Systems

Volumn 14, Issue 5, 2005, Pages 1039-1050

  Agah, Masoud ^a   Potkay, Joseph A ^b   Lambertus, Gordon ^b   Sacks, Richard ^b   Wise, Kensall D ^b  

^a State University   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Micro gas chromatography; Packaging; Separation column; Thermal behavior

Indexed keywords

COLUMN CHROMATOGRAPHY; FLOW CONTROL; GAS CHROMATOGRAPHY; HEAT CONDUCTION; HEAT CONVECTION; HEAT LOSSES; HEAT RADIATION; MICROSENSORS; SILICON SENSORS; TEMPERATURE CONTROL; VACUUM APPLICATIONS;

GAS CHROMATOGRAPHY COLUMNS; HIGH-PERFORMANCE TEMPERATURE-PROGRAMMED COLUMNS; INTEGRATED HEATERS; MICRO-GAS CHROMATOGRAPHY; PRESSURE SENSORS; SEPARATION COLUMN; TEMPERATURE SENSORS; THERMAL BEHAVIOR;

MICROELECTROMECHANICAL DEVICES;

EID: 27644579465     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.856648     Document Type: Article

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