Flow characteristics in a microchannel system integrated with arrays of micro-pressure sensors using a polymer material

Journal of Micromechanics and Microengineering

Volumn 18, Issue 7, 2008, Pages

  Ko, H S ^a   Liu, C W ^b   Gau, C ^a   Jeng, D Z ^a,c  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^c CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CLADDING (COATING); DETECTORS; DIAPHRAGMS; LITHOGRAPHY; MICROCHANNELS; MICROMACHINING; NANOFLUIDICS; OPTICAL DESIGN; POLYMERS; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SENSORS; SPIN COATING;

DETAILED DESIGN; FABRICATION PROCESSES; FABRICATION TECHNIQUES; FLOW CHARACTERISTICS; FLOW CONDITIONING; FLOW THROUGH; MEASUREMENT RANGE; MICRO CHANNEL SYSTEMS; MICRO FLUIDIC; POLYMER MATERIALS; SPIN COATINGS; SURFACE MICROMACHINING PROCESSES;

ORGANIC POLYMERS;

EID: 47249113488     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/7/075016     Document Type: Article

References (22)

1. George M 2006 The origins and the future of microfluidics Nature 442 368-73
2. Vilkner T, Janasek D and Manz A 2004 Micro total analysis systems. Recent developments Anal. Chem. 76 3373-85
3. Craighead H 2006 Future lab-on-chip technologies for interrogating individual molecules Nature 442 387-93
4. Farokhzad O C, Khademhosseini A, Jon S, Hermmann A, Cheng J, Chin C, Kiselyuk A, Teply B, Eng G and Langer R 2005 Microfluidic system for studying the interaction of nanoparticles and microparticles with cells Anal. Chem. 77 5453-9
5. Bayraktar T and Pidugu S B 2006 Review: characterization of liquid flows in microfluidic systems Int. J. Heat Mass Transfer 49 815-24
6. Arkilic E B and Schmidt M A 1997 Gaseous slip flow in long microchannels J. Microelectromech. Syst. 6 167-78
7. Takuto A, Soo K M, Hiroshi I and Kenjiro S 2000 An experimental investigation of gaseous flow characteristics in microchannels Proc. Int. Conf. on Heat Transfer and Transport Phenomena in Microscale (Banff, Canada) pp 155-61
8. Wu H Y and Cheng P 2003 Friction factors in smooth trapezoidal silicon microchannels with different aspect ratios Int. J. Heat Mass Transfer 46 2519-25
9. Judy J, Maynes D and Webb B W 2002 Characterization of frictional pressure drop for liquid flows through microchannels Int. J. Heat Mass Transfer 45 3477-89
10. Kohl M J, Abdel-Khalik S I, Jeter S M and Sadowski D L 2005 An experimental investigation of microchannel flow with internal pressure measurements Int. J. Heat Mass Transfer 48 1518-33
11. Liu C W, Gau C and Dai B T 2004 Design and fabrication development of a micro flow heated channel with measurements of the inside micro-scale flow and heat transfer process Biosens. Bioelectron. 20 91-101
12. Rostami A A, Mjumdar A S and Saniel N 2002 Flow and heat transfer for gas flowing in microchannels: a review Heat Mass Transfer 38 359-67
13. Koo J and Kleinstreuer C 2003 Liquid flow in microchannels: experimental observations and computational analyses of microfluidics effects J. Micromech. Microeng. 13 568-79
14. Kleinstreuer C and Koo J 2004 Computational analysis of wall roughness effects for liquid flow in micro-conduits J. Fluid Eng. 126 1-9
15. Guo Z and Li Z 2003 Size effect on microscale single-phase flow and heat transfer Int. J. Heat Mass Transfer 46 149-59
16. Zohar Y, Lee Y K, Lee W Y, Jiang L and Tong P 2002 Subsonic gas flow in a straight and uniform microchannel J. Fluid Mech. 472 125-51
17. Li X, Lee W Y, Wong M and Zohar Y 2000 Gas flow in constriction microdevices Sensors Actuators 83 277-83
18. Lee W Y, Wong M and Zohar Y 2002 Pressure loss in constriction microchannels J. Microelectromech. Syst. 11 236-44
19. Ko H S, Liu C W and Gau C 2007 A novel fabrication for pressure sensor with polymer material and evaluation of its performance J. Micromech. Microeng. 17 1640-8
20. Ko H S, Liu C W, Gau C and Yang C S 2007 Fabrication and design of a heat transfer micro-channel system by a low temperature MEMS technique J. Micromech. Microeng. 17 983-93
21. Peng X F and Peterson G P 1996 Convective heat transfer and flow friction for water flow in microchannel structures Int. J. Heat Mass Transfer 39 2599-608
22. Peng X F, Peterson G P and Wang B X 1994 Frictional flow characteristics of water flowing through rectangular microchannels Exp. Heat Transfer 7 249-64