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Volumn 201, Issue 22-23 SPEC. ISS., 2007, Pages 8813-8817

Knudsen cell mass spectrometry applied to the investigation of organometallic precursors vapours

Author keywords

Knudsen cell; Mass spectrometry; PDMAT; Vapour pressure

Indexed keywords

EVAPORATION; MASS SPECTROMETERS; SUBLIMATION; TEMPERATURE; VAPOR PRESSURE; VAPORIZATION;

EFFUSION ORIFICE; KNUDSEN CELL; VACUUM CHAMBER;

ORGANOMETALLICS;

EVAPORATION; MASS SPECTROMETERS; ORGANOMETALLICS; SUBLIMATION; TEMPERATURE; VAPOR PRESSURE; VAPORIZATION;

EID: 34547651349 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2007.04.051 Document Type: Article

Times cited : (13)

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