Characteristics of ZrC/ZrN and ZrC/TiN multilayers grown by pulsed laser deposition

Applied Surface Science

Volumn 257, Issue 12, 2011, Pages 5332-5336

  Craciun, D ^a   Bourne, G ^b   Socol, G ^a   Stefan, N ^a   Dorcioman, G ^a   Lambers, E ^b   Craciun, V ^a,b  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

Multilayers; Pulsed laser deposition; Thin films; TiN; ZrC; ZrN

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; EXCIMER LASERS; FILM PREPARATION; MULTILAYER FILMS; MULTILAYERS; PULSED LASER DEPOSITION; PULSED LASERS; THIN FILMS; TIN; TITANIUM NITRIDE; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

AUGER ELECTRON SPECTROSCOPIES (AES); ELEMENTAL COMPOSITIONS; HARDNESS VALUES; KRF EXCIMER LASER; OXYGEN CONTAMINATION; SI SUBSTRATES; X RAY REFLECTIVITY; X-RAY DIFFRACTION INVESTIGATIONS;

ZIRCONIUM COMPOUNDS;

EID: 79952316828     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.11.106     Document Type: Conference Paper

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