Fabrication and characterization of Spindt-type field emission arrays coated with ZrC thin films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 3, 2006, Pages 1436-1439

  Li, Hanyan ^a   Ding, Mingqing ^a   Feng, Jinjun ^a   Li, Xinghui ^a   Bai, Guodong ^a   Zhang, Fuquan ^a  

^a BEIJING VACUUM ELECTRONICS RESEARCH INSTITUTE   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; DESORPTION; ELECTRON BEAMS; EVAPORATION; FINITE ELEMENT METHOD; MOLYBDENUM; ZIRCONIUM COMPOUNDS;

CELL GEOMETRY; ELECTRON BEAM EVAPORATION; EMISSION-STIMULATED DESORPTION; SURFACE ADSORBATES;

THIN FILMS;

EID: 33744821643     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2203640     Document Type: Article

References (8)

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