Nanoscale ZrC/ZrB2 multilayered coatings prepared by magnetron sputtering

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 2, 2007, Pages

  Li, D J ^a   Yang, J ^a   Zhang, X H ^a   Cao, M ^a  

^a TIANJIN NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COATINGS; MAGNETRON SPUTTERING; MULTILAYERS; NANOINDENTATION; SYNTHESIS (CHEMICAL); ZIRCONIUM COMPOUNDS;

MULTILAYERED STRUCTURE; NANOSCALE BILAYER;

NANOSTRUCTURED MATERIALS;

EID: 34047111302     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2464116     Document Type: Article

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