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Volumn 8, Issue 1, 2006, Pages 20-23
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Mechanical properties of ZrC thin films grown by pulsed laser deposition
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Author keywords
Epitaxial films; Hardness; Laser ablation; Nanoindentation; ZrC
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CRYSTALLINITY;
EPITAXIAL FILMS;
HARDNESS;
LASER ABLATION;
NANOINDENTATION;
PULSED LASER DEPOSITION;
PULSED LASERS;
SAPPHIRE;
SILICON;
SUBSTRATES;
X RAY DIFFRACTION;
CRYSTALLINE QUALITY;
DEGREE OF CRYSTALLINITY;
IN-PLANE ORIENTATION;
NANO-INDENTATION MEASUREMENTS;
OUT-OF PLANE;
PULSED-LASER DEPOSITION TECHNIQUE;
SAPPHIRE SUBSTRATES;
X RAY REFLECTIVITY;
ZIRCONIUM COMPOUNDS;
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EID: 33645988242
PISSN: 14544164
EISSN: None
Source Type: Journal
DOI: None Document Type: Conference Paper |
Times cited : (17)
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References (15)
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